This three-axis stage system was originally part of a Prometrix FT650 film thickness measurement system.

Paired support rails 23.5″ x 2″ by 4″ carry both the XY linear table, and the framework for supporting the Z-axis drive system. The XY stage has close to 14″ travel in the Y direction, and 8″ travel in the X direction. The circular stage vacuum chuck is 8.5″ in diameter and has channels for all standard wafer sizes from 2 inches to 8 inches. Vacuum is blocked from the unused channels using a special stop screw specific to each wafer size. There are two cutouts on the chuck for wafer handling equipment. It appears that the chuck is able to adjust in theta, but I am not certain to what degree it may be turned.

Both X and Y motions run on paired linear ball slides with recirculating bearings. They are driven by 14mm diameter ball screws with a 1.775mm pitch. Both XY drive motors are present. There are no encoders or scales on the XY motions. The Z-axis drive carries a dovetail for an Olympus motorized turret as found on their BHMJL-3 semiconductor inspection microscopes. The connections for the motor are present, but the turret is not included. The dovetail moves on cross-roller bearings and is actuated by a worm-driven lead screw using an Elcom motor with integrated encoder. The support for the nosepiece turret is very substantial – originally it also carried the film-thickness IR spectrometer and the rest of the imaging apparatus above the nosepiece with objectives.

Overall size of the apparatus is 17″ wide, 24.5″ deep, and 15.75″ tall. No driver electronics are present. This stage was removed from a Prometrix Model FT-650 film-thickness measurement system. It is in excellent condition.

Please note that the Olympus motorized nosepiece in the last photo is not included. No driver electronics or cables (other than those seen in the photos) are included with the stage.
***MPN FT650 part
***OEM Prometrix Corp
***SKU*** 21541