Verteq ST600-C1-MC2-PVDF Frequency Generator and Keypad

Product Description

Verteq ST600-C1-MC2-PVDF Megasonic Frequency Generator with Keypad – For Semiconductor Wafer Cleaning Systems

This used Verteq ST600-C1-MC2-PVDF is a specialized megasonic frequency generator designed for semiconductor wafer cleaning and processing equipment. It includes the associated keypad for user control and programming.

Verteq (later part of CFM Technologies and then Mattson Technology) was a leading manufacturer of wet cleaning systems for the semiconductor industry. Their Sunburst™ megasonic technology was widely used for advanced photoresist removal and wafer cleaning applications .

The PVDF designation indicates construction with polyvinylidene fluoride, a chemically resistant fluoropolymer essential for withstanding the aggressive chemistries used in semiconductor wet processing.

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About Verteq Megasonic Technology

Megasonic cleaning uses high-frequency sound waves (typically 0.8-2 MHz) to enhance chemical cleaning processes on silicon wafers. The Verteq Sunburst™ system provides:

• Variable frequency control for optimized cleaning

• Precise power delivery to transducer arrays

• Chemical-resistant construction for wet environments

• Consistent, repeatable results for critical cleaning steps

This technology was used in Quick Dump Rinsers (QDRs) and other wet process stations to remove particles, metals, and organic contaminants from wafer surfaces .

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Key Specifications

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Applications

• Semiconductor Wafer Cleaning: Megasonic-enhanced chemical cleaning

• Photoresist Removal: Stripping resist after lithography

• Particle Removal: Eliminating contaminants from wafer surfaces

• Post-CMP Cleaning: Cleaning after chemical-mechanical planarization

• Surface Preparation: Pre-deposition and pre-etch cleaning

• Quick Dump Rinsers: Integration with Verteq QDR systems

The Verteq Cobra VcS SA cleaning system, for example, uses a combination of ultra-dilute chemistries, advanced megasonics, and the VcS process for high-efficiency removal of particles, metals, and organics from wafer surfaces .

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System Context

The ST600-C1-MC2-PVDF is part of Verteq’s Sunburst™ family of megasonic controllers. A related model, the STQD600-C2-M2, was used in the Sunburst Turbo Quick Dump Megasonic Process Controller . These generators work with transducer arrays to deliver megasonic energy to the cleaning bath.

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Condition

SOLD AS IS
USED – SHOWS NORMAL WEAR (scuffs, minor marks)
POWER ON NOT TESTED – FUNCTIONALITY UNKNOWN
NO TRANSDUCER ARRAY, POWER SUPPLY, OR CABLES INCLUDED
PICTURE MAY NOT MATCH PRODUCT