Kensington XY-Theta Stage, 8 by 8 Inch Range,

This is certainly the finest stage ever made for the examination of 8-inch wafers under a microscope This Kensington stage is very massive (over 200 pounds) and formed the base of the Reichert Polyvar SC semiconductor research microscope. For that reason the base is quite long in the front-to-rear dimension  the upright frame of the Polyvar was secured to the rear center of the base.

The stage consists of four independent motions. The bottom X translator occupies much of the base plate with 8 inches of motion front-to-back. Sitting on top of that is a second 8-inch translator for the  axis. On top of the Y translator is an 8-inch diameter rotary stage. This stage may be moved in the Z axis through several millimeters.

All motions can be actuated manually using provided knobs. The stage is intended to be driven by a Model 4000 multi-axis controller equipped with suitable driver boards. The standard user interface is a small keypad that displays coordinates of the stage and degrees of theta rotation. This listing is ONLY for the actual stage as illustrated. The controllers and the driver boards are available separately, as are some of the user interface keypads.

The specifications on the Kensington 4000 series stages are most impressive  0.1 micron resolution, 0.2 micron repeatability, and 1 micron total measurement error over the entire range of travel. Readout is via glass scales (covers shown removed on the X axis so construction may be seen). Theta rotation can be read to 4 arc seconds, with similar specifications for repeatability and accuracy. The theta stage has a recess for use with wafer loading equipment. The stage surface is provided with vacuum connections. Vacuum line connections are located on back panel immediately above the electrical axis connectors.

The stages are in spectacular condition. You will need to add a Model 4000 five-axis control system plus one axis driver board for each axis (Z-axis is optional, as is the theta axis, but a theta axis board is strongly recommended) Other components needed are the connection cables, and the user interface keypad with display. All of these components are manufactured by Kensington.

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***MPN XY-Theta
***OEM Kensington
***SKU*** DP503