Tylan FC-260 500 SCCM NH3 mass flow controller

Product Description

Tylan FC-260 Mass Flow Controller – 500 SCCM Ammonia (NH₃), 150 PSIG Max

This as-is Tylan FC-260 is a precision mass flow controller (MFC) engineered for accurate and repeatable control of gas flow in demanding applications such as semiconductor processing, thin-film deposition, and industrial gas systems. This unit is specifically configured for ammonia (NH₃) service with a flow range of 500 SCCM.

Key Features & Specifications:

• Model: FC-260 (Tylan, now part of Entegris)

• Gas: Ammonia (NH₃) – Special seals and cleaning for corrosive service

• Flow Range: 500 SCCM (Standard Cubic Centimeters Per Minute)

• Maximum Inlet Pressure: 150 PSIG

• Seals: Compatible with ammonia service (Kalrez, Chemraz, or specialized materials)

Condition:

SOLD AS IS
UNTESTED – FOR PARTS OR REPAIR
CALIBRATION/ACCURACY NOT VERIFIED
NO CABLE OR POWER SUPPLY INCLUDED
PICTURE MAY NOT MATCH PRODUCT

⚠ HAZARDOUS GAS SERVICE WARNING: This controller is configured for ammonia (NH₃), a corrosive and hazardous gas. Do not use with incompatible gases. Ensure system is properly cleaned, sealed, and maintained for NH₃ compatibility. Use appropriate safety protocols.

Potential Applications:

• Semiconductor wafer processing (nitride deposition)

• LED and solar cell manufacturing

• Chemical vapor deposition (CVD)

• Industrial gas blending

• Replacement for existing FC-260 units in NH₃ service