Tylan FC-260 5 SLPM O2 mass flow controller

Product Description

Tylan FC-260 Mass Flow Controller – 5 SLPM Oxygen (O₂), 150 PSIG Max

This as-is Tylan FC-260 is a precision mass flow controller (MFC) designed for accurate and repeatable control of gas flow in semiconductor processing, analytical instrumentation, and industrial gas systems. This unit is specifically configured for oxygen (O₂) service with a flow range of 5 SLPM.

Key Features & Specifications:

• Model: FC-260 (Tylan, now part of Entegris)

• Gas: Oxygen (O₂) – Cleaned for oxygen service

• Flow Range: 5 SLPM (Standard Liters Per Minute)

• Maximum Inlet Pressure: 150 PSIG

• Seals: Compatible with oxygen service (Viton or similar)

Condition:

SOLD AS IS
UNTESTED – FOR PARTS OR REPAIR
CALIBRATION/ACCURACY NOT VERIFIED
NO CABLE OR POWER SUPPLY INCLUDED
FITTINGS INCLUDED? [Specify] PICTURE MAY NOT MATCH PRODUCT

⚠ OXYGEN SERVICE WARNING: This controller is configured for oxygen service. Do not use with incompatible gases. Ensure system is properly cleaned and maintained for oxygen compatibility.

Potential Applications:

• Semiconductor wafer processing (oxidation, CVD)

• Analytical instrumentation

• Gas blending and distribution systems

• Laboratory research setups

• Replacement for existing FC-260 units