Varian 9698217 TPS-Compact TV81M turbo pump

Product Description

Varian (Agilent) 9698217 TPS-Compact TV81M Turbomolecular Pumping System – KF40 Inlet, IDP3 Scroll Pump, 110V, Exchange Unit

This used Varian TPS-Compact (now Agilent Technologies) is a complete, integrated turbomolecular pumping system designed for high and ultra-high vacuum (UHV) applications . The system includes a TV81M turbopump with integrated controller, an IDP3 dry scroll forepump, and all necessary interconnections, making it a ready-to-run solution for vacuum systems requiring clean, oil-free pumping .

The TPS-Compact series is ideal for applications that demand a contaminant-free vacuum environment, including electron microscopy, surface analysis, mass spectrometry, and thin-film deposition . This unit is identified as an “Exchange” unit, which typically indicates it is a service replacement or refurbished unit.

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Key Specifications

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System Components

The TPS-Compact integrates several key components into a single, compact package :

• TV81M Turbopump: A high-performance turbomolecular pump with Macrotorr technology for high compression ratios and fast pumpdown. The turbine is machined from a single block of high-strength aluminum alloy and supported by permanently lubricated ceramic ball bearings .

• Integrated Controller: A solid-state frequency converter that converts single-phase AC mains into the three-phase medium-frequency power required to drive the turbopump . The controller includes a microprocessor, analog/digital I/O, and serial communication ports .

• IDP3 Dry Scroll Forepump: A maintenance-free, oil-free scroll pump that provides the necessary backing pressure for the turbopump . The scroll mechanism uses a dual-scroll design for quiet, reliable operation .

• Control Panel: Features status LED, connectors for remote control, serial communication, optional vent valve, and external gauge .

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Applications

• Electron Microscopy (SEM/TEM) : Clean, vibration-free vacuum for electron optics

• Surface Analysis: XPS, AES, SIMS, and other UHV techniques

• Mass Spectrometry: GC-MS, ICP-MS, and other analytical instruments

• Thin Film Deposition: Sputtering, evaporation, and CVD systems

• Research & Development: General high and ultra-high vacuum experimentation

• Semiconductor Processing: Wafer handling and process tools

• Optical Coating: Precision coating applications requiring clean vacuum

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Condition Note: “Exchange Unit”

This unit is identified as an “Exchange” unit. In the vacuum industry, this typically means:

• It may be a service replacement or refurbished unit

• May have been returned as part of a warranty exchange program

• Should be inspected and leak-checked before installation in critical applications

• May have unknown operating hours or service history

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Condition Summary

SOLD AS IS
USED – “EXCHANGE” UNIT – SERVICE HISTORY UNKNOWN
SYSTEM: INCLUDES TV81M TURBOPUMP, IDP3 SCROLL PUMP, INTEGRATED CONTROLLER
INLET FLANGE: KF-40
POWER: 110V, 60 Hz
PUMPS: CONDITION UNKNOWN – MAY HAVE UNKNOWN OPERATING HOURS
CONTROLLER: FUNCTIONALITY NOT VERIFIED
NO REMOTE CONTROL CABLE, SOFTWARE, OR ACCESSORIES INCLUDED
PICTURE MAY NOT MATCH PRODUCT

⚠ VACUUM SYSTEM NOTE: This complete pumping system should be leak-checked and have its performance verified before installation in critical applications. The “Exchange” designation means it may have been serviced or refurbished, but its current condition cannot be guaranteed.