Product Description
Varian (Agilent) 9698217 TPS-Compact TV81M Turbomolecular Pumping System – KF40 Inlet, IDP3 Scroll Pump, 110V, Exchange Unit
This used Varian TPS-Compact (now Agilent Technologies) is a complete, integrated turbomolecular pumping system designed for high and ultra-high vacuum (UHV) applications . The system includes a TV81M turbopump with integrated controller, an IDP3 dry scroll forepump, and all necessary interconnections, making it a ready-to-run solution for vacuum systems requiring clean, oil-free pumping .
The TPS-Compact series is ideal for applications that demand a contaminant-free vacuum environment, including electron microscopy, surface analysis, mass spectrometry, and thin-film deposition . This unit is identified as an “Exchange” unit, which typically indicates it is a service replacement or refurbished unit.
Key Specifications
| Specification | Details |
|---|---|
| Manufacturer | Varian, Inc. (now Agilent Technologies) |
| Part Number | 9698217 |
| System Model | TPS-Compact |
| Turbopump Model | TV81M |
| Pumping Speed (N₂) | 60 l/s |
| Base Pressure | < 1×10⁻⁸ mbar with ISO/KF flange; < 1×10⁻⁹ mbar with CFF flange |
| Inlet Flange | KF-40 |
| Foreline Connection | KF-16 (typical) |
| Turbopump Speed | 80,000 RPM |
| Start-up Time | < 2 minutes |
| Forepump | IDP3 Dry Scroll Pump (3.6 m³/h) |
| Power Supply | 110V AC, 60 Hz (as noted) |
| Max Input Power | 260 VA (TV81M system) |
| Controller | Integrated, with microprocessor control |
| Control Interface | Remote via serial connection (RS-232/485), I/O connector |
| Cooling | Natural convection (air-cooled) |
| Noise Level | 55 dB(A) at 1 meter |
| Weight | System: approx. 16.7 kg (36.8 lbs) |
| Compliance | EN 55011, EN 61000, EN 61010, EN 1012-2 |
System Components
The TPS-Compact integrates several key components into a single, compact package :
-
TV81M Turbopump: A high-performance turbomolecular pump with Macrotorr technology for high compression ratios and fast pumpdown. The turbine is machined from a single block of high-strength aluminum alloy and supported by permanently lubricated ceramic ball bearings .
-
Integrated Controller: A solid-state frequency converter that converts single-phase AC mains into the three-phase medium-frequency power required to drive the turbopump . The controller includes a microprocessor, analog/digital I/O, and serial communication ports .
-
IDP3 Dry Scroll Forepump: A maintenance-free, oil-free scroll pump that provides the necessary backing pressure for the turbopump . The scroll mechanism uses a dual-scroll design for quiet, reliable operation .
-
Control Panel: Features status LED, connectors for remote control, serial communication, optional vent valve, and external gauge .
Applications
-
Electron Microscopy (SEM/TEM) : Clean, vibration-free vacuum for electron optics
-
Surface Analysis: XPS, AES, SIMS, and other UHV techniques
-
Mass Spectrometry: GC-MS, ICP-MS, and other analytical instruments
-
Thin Film Deposition: Sputtering, evaporation, and CVD systems
-
Research & Development: General high and ultra-high vacuum experimentation
-
Semiconductor Processing: Wafer handling and process tools
-
Optical Coating: Precision coating applications requiring clean vacuum
Condition Note: “Exchange Unit”
This unit is identified as an “Exchange” unit. In the vacuum industry, this typically means:
-
It may be a service replacement or refurbished unit
-
May have been returned as part of a warranty exchange program
-
Should be inspected and leak-checked before installation in critical applications
-
May have unknown operating hours or service history
Condition Summary
SOLD AS IS
USED – “EXCHANGE” UNIT – SERVICE HISTORY UNKNOWN
SYSTEM: INCLUDES TV81M TURBOPUMP, IDP3 SCROLL PUMP, INTEGRATED CONTROLLER
INLET FLANGE: KF-40
POWER: 110V, 60 Hz
PUMPS: CONDITION UNKNOWN – MAY HAVE UNKNOWN OPERATING HOURS
CONTROLLER: FUNCTIONALITY NOT VERIFIED
NO REMOTE CONTROL CABLE, SOFTWARE, OR ACCESSORIES INCLUDED
PICTURE MAY NOT MATCH PRODUCT
⚠ VACUUM SYSTEM NOTE: This complete pumping system should be leak-checked and have its performance verified before installation in critical applications. The “Exchange” designation means it may have been serviced or refurbished, but its current condition cannot be guaranteed.



