Varian EX9698217 TPS-Compact V81M exchange turbo pump

Product Description

Varian (Agilent) EX9698217 Exchange TPS-Compact V81M Turbomolecular Pumping System – KF40 Inlet, 120V

This used Varian EX9698217 is an “Exchange” TPS-Compact turbomolecular pumping system, designed for high and ultra-high vacuum (UHV) applications. The system includes a V81M turbopump with integrated controller, all necessary interconnections, and is configured for 120V operation.

The TPS-Compact series is ideal for applications that demand a contaminant-free vacuum environment, including electron microscopy, surface analysis, mass spectrometry, and thin-film deposition . The system features an integrated controller that automatically recognizes mains presence and starts the pump when power is applied .

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Key Specifications

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System Features

• Integrated Controller: A solid-state frequency converter that converts single-phase AC mains into the three-phase medium-frequency power required to drive the turbopump. The controller includes a microprocessor and status LED .

• Status LED: The blue LED on the rear panel indicates system status :

  • No flashing: Pump is normally rotating

  • Slow flashing (~400ms): System in ramp, braking, stop, or waiting for interlock

  • Fast flashing (~200ms): Error condition

• Soft Start Mode: Recommended for first start-up to protect the pump

• Easy Operation: Simply supply mains power and move the external switch to ON position

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Important Operational Notes

From the TPS-Compact instruction manual :

• Mounting: The turbopump must be fixed to the vacuum chamber by means of appropriate Varian hardware. The TPS-compact cannot be fixed by means of its base .

• Venting: Use inert gas free from dust, particles, or humidity (like Nitrogen) for venting the pump. Pressure at the vent port must be less than 2 bar above atmospheric pressure .

• Never use the pumping system when the turbo inlet flange is not connected to the vacuum chamber or is not blanked .

• Temperature limits: During chamber heating, the inlet flange temperature must not exceed 120°C .

• Hazardous gases: When pumping toxic, flammable, or radioactive gases, follow required procedures for each gas disposal. Do not use in presence of explosive gases .

• Maintenance: The TPS-compact does not require any maintenance (except tip-seal replacement). Any work must be carried out by authorized personnel .

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Applications

• Electron Microscopy (SEM/TEM) : Clean, vibration-free vacuum for electron optics

• Surface Analysis: XPS, AES, SIMS, and other UHV techniques

• Mass Spectrometry: GC-MS, ICP-MS, and other analytical instruments

• Thin Film Deposition: Sputtering, evaporation, and CVD systems

• Research & Development: General high and ultra-high vacuum experimentation

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Condition Note: “Exchange Unit”

This unit is identified as an “Exchange” unit. In the vacuum industry, this typically means:

• It may be a service replacement or refurbished unit

• May have been returned as part of a warranty exchange program

• Should be inspected and leak-checked before installation in critical applications

• May have unknown operating hours or service history

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Condition Summary

SOLD AS IS
USED – “EXCHANGE” UNIT – SERVICE HISTORY UNKNOWN
SYSTEM: INCLUDES V81M TURBOPUMP WITH INTEGRATED CONTROLLER
INLET FLANGE: KF-40
POWER: 120V, 60 Hz
PUMP: CONDITION UNKNOWN – MAY HAVE UNKNOWN OPERATING HOURS
CONTROLLER: FUNCTIONALITY NOT VERIFIED
NO REMOTE CONTROL CABLE, SOFTWARE, OR ACCESSORIES INCLUDED
PICTURE MAY NOT MATCH PRODUCT

⚠ VACUUM SYSTEM NOTE: This pumping system should be leak-checked and have its performance verified before installation in critical applications. The “Exchange” designation means it may have been serviced or refurbished, but its current condition cannot be guaranteed.

Before use: Verify the inlet flange is connected to the vacuum chamber or blanked. Never operate without proper connection .