Product Description
Vacuum Generators LTD Stainless Steel Vacuum Chamber – UHV Compatible, CF Flanges, 3.75″ ID x 12.5″ Length
This used Vacuum Generators LTD stainless steel chamber is a precision-fabricated ultra-high vacuum (UHV) vessel designed for research, semiconductor, and industrial applications. Vacuum Generators (VG, now part of VG Scienta) was a pioneering manufacturer of UHV equipment, surface science instruments, and vacuum components, known for exceptional quality and reliability .
About Vacuum Generators (VG)
Vacuum Generators was a UK-based company that became synonymous with high-quality UHV components and surface science instrumentation. Their products were widely used in:
-
Surface science research (XPS, AES, SIMS, LEED)
-
Molecular beam epitaxy (MBE) systems
-
Electron microscopy and sample preparation
-
Particle accelerator beamlines
-
Semiconductor processing equipment
VG components are still highly regarded and compatible with modern UHV systems using ConFlat (CF)-type flanges .
Chamber Specifications
| Specification | Details |
|---|---|
| Manufacturer | Vacuum Generators LTD (VG) |
| Type | Stainless steel UHV chamber |
| Interior Dimensions | 3.75″ ID x 12.5″ length |
| Material | Stainless steel (304/316 series typical for UHV) |
| Flange Type | CF (ConFlat)-style knife-edge flanges |
| Flange Compatibility | Compatible with standard CF components and copper gaskets |
| UHV Rating | Capable of <1×10⁻¹⁰ mbar with proper pumping and bakeout |
| Bakeout Temperature | 200-250°C typical (dependent on seals/components) |
| Application | Research, surface science, semiconductor processing |
CF Flange System
ConFlat (CF) flanges are the industry standard for UHV applications, featuring :
-
Knife-edge sealing surface that embeds into a soft copper gasket
-
All-metal seal for bakeable, leak-tight UHV performance
-
Interchangeable across manufacturers following ISO 3669 standards
-
Pressure ratings down to 1×10⁻¹³ mbar achievable
This chamber’s CF flanges ensure compatibility with a wide range of vacuum components, including pumps, gauges, viewports, and feedthroughs from various manufacturers.
Applications
-
Surface Science: XPS, AES, SIMS, LEED, and other UHV analytical techniques
-
Thin Film Deposition: Sputtering, evaporation, MBE, and CVD systems
-
Semiconductor Processing: Wafer handling, etching, and metrology chambers
-
Research: General UHV experimentation, gas handling, and sample preparation
-
Aerospace/Defense: Space simulation and materials testing
-
Analytical Instrumentation: Mass spectrometry, electron microscopy
Condition
SOLD AS IS
USED – SHOWS NORMAL LAB WEAR (scuffs, minor marks)
LEAK CHECK NOT PERFORMED – VACUUM INTEGRITY UNVERIFIED
NO PUMPS, GAUGES, OR ACCESSORIES INCLUDED (chamber only)
PICTURE MAY NOT MATCH PRODUCT
⚠ VACUUM COMPONENT NOTE: Used vacuum chambers should be leak-checked before installation in critical systems. The CF knife-edge sealing surfaces must be undamaged for proper UHV performance. New copper gaskets should always be used when reassembling.



