MKS 252A-1 exhaust valve controller

Product Description

MKS 252A-1 Exhaust Valve Controller – For Pressure Control Systems

This used MKS 252A-1 is a specialized exhaust valve controller designed for precise pressure regulation in vacuum and process systems. It drives stepper motors to position throttle valves, maintaining accurate pressure control in semiconductor manufacturing, thin-film deposition, and research applications.

About the MKS 252A Series :

The MKS 252A Exhaust Valve Controller is part of MKS Instruments’ line of pressure control solutions. It interfaces with pressure transducers (such as MKS Baratron® capacitance manometers) and drives stepper motor-actuated throttle valves to maintain a user-set pressure setpoint. The controller is documented in technical manuals from MKS Instruments .

A similar model (252A-1-SP033-85) has been observed in surplus listings, confirming the series’ presence in research and industrial settings .

Key Features & Specifications :

Typical System Components :

A complete MKS pressure control system typically includes:

• 252A-1 Controller: This unit

• Pressure Transducer: MKS Baratron® capacitance manometer

• Throttle Valve: Stepper motor-actuated exhaust valve

• Connecting Cables: Between controller, transducer, and valve

Condition:

SOLD AS IS
USED – SHOWS NORMAL WEAR (rack marks, scuffs, cosmetic wear)
UNTESTED – CONTROL FUNCTION NOT VERIFIED
NO PRESSURE TRANSDUCER, VALVE, OR CABLES INCLUDED
PICTURE MAY NOT MATCH PRODUCT

Potential Applications:

• Replacement controller for existing MKS 252 systems

• Semiconductor process chamber pressure control

• Thin-film deposition systems (PVD, CVD)

• Research vacuum systems

• Parts salvage for MKS pressure control equipment