Zygo 6300-0196-01R Michelson Objective with 50X/0.55 and 10X/0.30 – High-Resolution Surface Profiling

Product Overview:

The Zygo 6300-0196-01R Michelson Objective with Zygo 50X/0.55 and 10X/0.30 Objectives provides high-quality optical precision for advanced surface profiling and metrology applications. These objectives are designed for use with Zygo’s interferometers and optical profilometers, enabling accurate, non-contact surface analysis with nanometer-level precision. The set includes a 1X Michelson objective, along with 50X/0.55 and 10X/0.30 objectives, which are optimized for different measurement needs, offering flexibility in a range of scientific and industrial applications, including semiconductor inspection, materials characterization, and microelectronics.

Key Specifications:

• Objective Type: 1X Michelson Objective, 50X/0.55, and 10X/0.30 objectives
• Numerical Aperture (NA): 50X/0.55 provides a high numerical aperture for enhanced resolution, and 10X/0.30 ensures broader field of view with moderate resolution.
• Resolution: Achieves sub-micron resolution with the 50X objective, and micrometer scale with the 10X objective.
• Field of View: 50X objective is ideal for detailed, high-resolution analysis, while the 10X objective is more suited for broader, lower magnification scans.
• Material Compatibility: Designed to work on a range of surfaces, including semiconductor wafers, polished metals, and ceramics.
• Integration: Compatible with Zygo interferometers and optical profilers, providing seamless integration with existing systems.

Key Features:

• Flexible Measurement Options: The combination of 1X, 50X, and 10X objectives ensures versatility for a range of surface profiling and metrology applications.
• High Resolution and Accuracy: The 50X/0.55 objective enables extremely high-resolution imaging, ideal for precise surface topography measurements.
• Broad Field of View: The 10X/0.30 objective allows for a broader field of view, making it easier to scan larger sample areas.
• Non-Contact Surface Profiling: Ideal for non-invasive measurements, ensuring the integrity of delicate samples like semiconductors and thin films.
• Seamless Zygo System Integration: These objectives are specifically designed to integrate smoothly with Zygo’s interferometers and optical profilometers, optimizing system performance and reliability.

Conclusion:

The Zygo 6300-0196-01R Michelson Objective with Zygo 50X/0.55 and 10X/0.30 Objectives is a crucial tool for researchers and engineers working in semiconductor, materials science, and precision metrology. These high-performance objectives provide exceptional resolution, flexibility, and non-contact measurement capabilities, making them an indispensable component in advanced surface analysis systems.

Zygo 6300-0196-01R 1X Michelson Objective with Zygo 50X/0.55 and 10X/0.30 Objectives
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