Product Description
Varian Turbo Cart Pumping Station – Mobile High-Vacuum System with Turbo-V250 Turbomolecular Pump
This used Varian Turbo Cart is an integrated, mobile high-vacuum pumping station designed for research, semiconductor, and industrial applications. The system includes a Turbo-V250 turbomolecular pump (250 L/s pumping speed for N₂ ), a dry scroll backing pump, and an integrated controller, all mounted on a wheeled cart for portability .
The Turbo-V250 is a 250 L/s, magnetically levitated turbo pump with an ISO-100 or CF flange inlet. It features maintenance-free magnetic bearings, integrated digital control, and a maximum allowable inlet pressure of 0.1 mbar . The pump is widely used in semiconductor processing, analytical instrumentation, and R&D applications requiring clean, high vacuum levels .
Key Specifications
| Specification | Details |
|---|---|
| Manufacturer | Varian (now Agilent) |
| Model | Turbo-V250 |
| Type | Magnetically levitated turbomolecular pump |
| Pumping Speed (N₂) | 250 L/s |
| Compression Ratio (N₂) | 1 × 10⁹ |
| Inlet Flange | ISO-100, CF, or KF-40 (depending on variant) |
| Base Pressure | < 1 × 10⁻⁸ mbar (with appropriate backing pump) |
| Backing Pump | Dry scroll pump (likely IDP-3 or similar) |
| Rotor Speed | 60,000 RPM |
| Controller | Varian integrated controller with LCD display |
| Power Requirements | 100-240 VAC, 50/60 Hz |
| Cooling | Forced air (integrated fan) |
| Applications | Semiconductor, R&D, surface science, thin-film deposition |
| Condition | Used – Untested |
Key Features & Benefits
| Feature | Benefit |
|---|---|
| 250 L/s Pumping Speed | Suitable for a wide range of high-vacuum and UHV applications |
| Magnetic Bearings | Maintenance-free, oil-free, and vibration-free operation |
| Mobile Cart Design | Easily moved between chambers and workstations |
| Integrated Controller | Full pump control, status monitoring, and diagnostics |
| Dry Backing Pump | Hydrocarbon-free operation for clean vacuum |
| High Compression Ratio | Excellent light gas handling for demanding applications |
| Wide Application Range | Semiconductor processing, analytical instruments, R&D labs |
Applications
-
Semiconductor Manufacturing: Wafer processing, sputtering, etching
-
Analytical Instruments: Mass spectrometry, gas analysis
-
Research & Development: Surface science, MBE, UHV systems
-
Thin Film Deposition: Sputtering, evaporation, CVD
-
Space Simulation: Testing and simulation of space environments
-
General High-Vacuum Applications: A versatile pump for many vacuum processes
Why This Works for Vacuum Professionals
| Feature | Benefit |
|---|---|
| Varian Quality | Trusted manufacturer of vacuum equipment |
| 250 L/s Speed | Versatile for many high-vacuum applications |
| Magnetic Bearings | Maintenance-free, vibration-free operation |
| Mobile Cart | Easy transport between workstations |
| Dry Scroll Pump | Oil-free, hydrocarbon-free vacuum |
| Integrated Controller | Complete system in a single cart |
| Legacy Value | Cost-effective way to acquire a complete high-vacuum system |
