Product Description
Varian Task-V70LP Integrated Turbomolecular Pumping Station – Clean High-Vacuum System for R&D and Semiconductor Applications
This used Varian Task-V70LP is a complete, integrated turbomolecular pumping station designed for high and ultra-high vacuum (UHV) applications . It is a “clean” vacuum system, free from polluting agents, making it suitable for semiconductor processing, research & development, thin-film deposition, and analytical instrumentation .
The system is centered around the Varian Turbo-V70LP turbomolecular pump, which provides a pumping speed of 60 liters per second for nitrogen (N₂) and achieves an ultimate pressure of 3.75 × 10⁻⁹ Torr . The pump features a high-speed turbine (75,000 rpm) with 10 bladed stages and 4 Macrotorr stages for exceptional compression .
The pump and its controller are integrated into a portable “mini” station, often including a roughing pump (such as the Varian SD-40 diaphragm pump) and a vacuum gauge controller (such as the BA2 Sentorr gauge) for a complete, ready-to-use system . The station is designed for operation with a foreline pump like the SD-40 or MD-6 .
Key Specifications
| Specification | Details |
|---|---|
| Manufacturer | Varian (now Agilent) |
| Model | Task-V70LP |
| Pump Type | Turbomolecular (Turbo-V70LP) |
| Pumping Speed (N₂) | 60 L/s |
| Ultimate Pressure | 3.75 × 10⁻⁹ Torr (with recommended backing pump) |
| Inlet Connection | ISO-63 (standard) |
| Foreline Connection | KF-16 |
| Rotational Speed | 75,000 RPM |
| Start-up Time | < 60 seconds |
| Base Pressure (ConFlat) | 2 × 10⁻¹⁰ mbar |
| Weight | Approx. 1.7 kg (pump only) |
| Condition | Used – Untested |
Applications
-
Semiconductor Processing: Sputtering, etching, and CVD .
-
Research & Development: UHV surface science, thin-film deposition .
-
Analytical Instrumentation: Mass spectrometry (noted in Q-AMS resources) .
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Lamp and Tube Processing: Evacuation and processing of vacuum tubes .
-
Cryopump Regeneration: Backing for cryopump regeneration cycles .
-
General High-Vacuum Applications: Ion pump roughing, system bakeout .
Why This Works for Vacuum Professionals
| Feature | Benefit |
|---|---|
| Varian Quality | Trusted manufacturer of vacuum equipment |
| Complete System | Integrated pump, controller, and often roughing pump and gauges |
| Clean Vacuum | Oil-free, contaminant-free operation |
| UHV Capability | Reaches 10⁻⁹ Torr for demanding applications |
| Proven Reliability | Used in semiconductor, research, and analytical applications |
| Legacy Value | Cost-effective way to acquire a complete high-vacuum system |
