Varian 9160063 TSP Replacement Filament

Product: Replacement filament kit for Varian Style TSP Cartridge (2¾″ CFF)

Part No: 9160063 (Package of 12 filaments)

Compatible With: Varian TSP cartridge part no 9160061 and equivalent TSP assemblies.

Contents: 12 individual filaments (for up to 4 cartridges, since 3 filaments per cartridge) polvac.com+1

Material: Titanium-molybdenum alloy (varied sources show generic “titanium sublimation” filament)

Application: Used in ultra-high vacuum (UHV) systems as the sublimation getter in TSP assemblies to pump getterable gases (H₂, N₂, H₂O etc). The filament is consumed during “sublimation” cycles to deposit titanium onto internal surfaces.