UHV multi-axis nano-positioning stage

Product Description

Ultra-High Vacuum (UHV) Multi-Axis Nano-Positioning Stage with Motorized Actuation & Control Electronics

This precision nano-positioning system delivers sub-nanometer resolution motion in ultra-high vacuum environments, complete with integrated motorization and control electronics.

Key Features:

• UHV Compatibility: Designed for ≤10⁻⁹ Torr operation

• Multi-Axis Motion: XYZ or XYZθ configurations available

• Sub-nm Resolution: Piezo or servo motor actuation

• Integrated Electronics: Includes drivers/controller

• Materials: Vacuum-compatible (stainless steel, ceramics)

Typical Applications:

• Synchrotron/X-ray instrumentation

• Quantum research systems

• Semiconductor wafer inspection

• Scanning probe microscopy

• Space simulation chambers

Technical Specifications:

• Travel Range: 50-200mm per axis (configurable)

• Resolution: <1nm (closed-loop)

• Load Capacity: 2-10kg

• Connections: UHV feedthrough compatible