Product Description
Tylan RO-20A Multi-Channel Readout Box – For Mass Flow Controllers
This used Tylan RO-20A is a dedicated multi-channel readout and power supply unit designed to interface with Tylan mass flow controllers (MFCs). It provides the necessary power, setpoint control, and flow readout for gas delivery systems in semiconductor processing, analytical instrumentation, and industrial gas control applications.
About Tylan Mass Flow Controllers
Tylan (now part of Entegris) was a pioneer and industry leader in thermal mass flow controller technology. Their FC-260, FC-280, and other series MFCs became industry standards in semiconductor and thin-film processing. The RO series readout boxes provided the control and display interface for these MFCs in laboratory and production environments.
Key Features & Specifications
| Specification | Details |
|---|---|
| Manufacturer | Tylan Corporation (now Entegris) |
| Model | RO-20A |
| Type | Multi-channel MFC readout / power supply |
| Number of Channels | [Likely 4 or 8 – check unit] |
| Compatibility | Tylan mass flow controllers (FC-260, FC-280 series) |
| Display | Digital readout(s) for flow rate |
| Control | Individual setpoint adjustment for each channel |
| Power Supply | Provides operating power to connected MFCs |
| Output Signal | [If known, e.g., 0-5V setpoint/readout] |
| Input Power | [If known, e.g., 115/230 VAC] |
| Form Factor | Benchtop or rack-mountable |
| Application | Gas flow control in semiconductor, analytical, and industrial systems |
Applications
-
Semiconductor Processing: CVD, etch, diffusion, and oxidation systems
-
Gas Panel Testing: Calibration and validation of mass flow controllers
-
Laboratory Gas Control: Research and analytical instrumentation
-
Industrial Process Control: Chemical and pharmaceutical manufacturing
-
Thin Film Deposition: Sputtering and evaporation systems
Condition
SOLD AS IS
USED – SHOWS NORMAL LAB WEAR (rack marks, scuffs, cosmetic wear)
UNTESTED – CHANNEL FUNCTION/DISPLAY NOT VERIFIED
NO MASS FLOW CONTROLLERS INCLUDED
NO CABLES INCLUDED (unless specified)
POWER CORD INCLUDED? [Specify]
PICTURE MAY NOT MATCH PRODUCT
⚠ SYSTEM NOTE: This readout box requires compatible Tylan MFCs and appropriate cables for operation. These are not included unless specified.
| Weight | 12.3 lbs |
|---|---|
| Dimensions | 18 × 12 × 12 in |
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