SensaArray Thermal Track 4

SensaArray Thermal Track 4

Model 482-08-4004

SN 04451

The SensaArray Thermal Track 4 is an advanced in-situ wafer temperature measurement system developed by KLA Corporation. It is designed to monitor and log temperature data from semiconductor wafer processes, providing critical insights into process conditions and equipment performance.​

Key Features:

• Real-Time Temperature Logging: Captures temperature data from up to 17 sensors embedded in the wafer, facilitating immediate troubleshooting and calibration of semiconductor processing equipment.

• User-Friendly Display: Features a handheld interface that presents a wafer image with digital temperature indicators at each sensor location, calculating minimum, maximum, and average temperatures for comprehensive analysis. ​

• Flexible Data Acquisition: Allows user-defined acquisition periods ranging from 200 milliseconds to 5 minutes, accommodating various process monitoring needs.

• Expandable Storage: Offers expandable data storage through RAM card slots, enabling extensive data logging capabilities

The Thermal Track 4 is particularly beneficial for applications such as checking and adjusting pyrometer calibrations, addressing temperature-related process issues, and performing preventive maintenance tailored to specific equipment configurations. ​