Product Description
Modutek C1115 Modubath Controller – Temperature Control for Semiconductor Wet Processing
This used Modutek C1115 Modubath is a specialized temperature controller designed for semiconductor wet bench applications. Modutek Corporation is a leading manufacturer of wet processing equipment for the semiconductor, photovoltaic, and biotechnology industries, including:
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Wet benches for wafer etching, cleaning, and stripping
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Temperature control systems for precise chemical bath management
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Chemical delivery systems
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Rinsing and drying systems
The Modubath series represents Modutek’s line of temperature-controlled baths for critical wet processes requiring precise thermal regulation.
About Modutek Wet Processing
Modutek equipment is used in:
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Semiconductor manufacturing – Wafer cleaning, etching, stripping
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Photovoltaics – Solar cell processing
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MEMS – Microelectromechanical systems fabrication
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Biotechnology – Laboratory and production wet processing
Temperature control is critical in these applications to ensure:
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Consistent etch rates
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Repeatable cleaning results
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Process uniformity across wafers
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Chemical stability
Key Specifications
| Specification | Details |
|---|---|
| Manufacturer | Modutek Corporation |
| Model | C1115 |
| Series | Modubath |
| Type | Temperature controller for wet benches |
| Function | Regulates temperature of chemical baths |
| Display | [Likely digital temperature readout] |
| Controls | [Temperature setpoint and control adjustments] |
| Inputs | [Temperature sensor input – RTD or thermocouple] |
| Outputs | [Heater control output, alarm contacts] |
| Communication | [Possible RS-232/485 for remote monitoring] |
| Power | [Standard line voltage – 115/230VAC] |
| Mounting | [Panel-mount or benchtop enclosure] |
| Applications | Semiconductor wet processing, chemical baths |
Applications
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Wet Etching: Temperature control for etch baths
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Wafer Cleaning: Maintaining precise cleaning bath temperatures
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Photoresist Stripping: Temperature-controlled strip baths
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Chemical Baths: General temperature regulation for wet processes
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Research & Development: Lab-scale wet processing
Condition
SOLD AS IS
USED – SHOWS NORMAL WEAR from semiconductor fab environment
POWER ON NOT TESTED – FUNCTIONALITY UNKNOWN
NO SENSOR, HEATER, OR CABLES INCLUDED
PICTURE MAY NOT MATCH PRODUCT



