Product Description
MKS Type 247B Four-Channel Readout – Mass Flow Controller Power Supply/Display
This used MKS Type 247B is a four-channel readout and power supply unit designed to operate and display flow readings from up to four MKS mass flow controllers (MFCs) simultaneously. MKS Instruments is the world leader in vacuum and process control technology, and their 247B is a standard in semiconductor, research, and industrial gas systems.
About the MKS 247B
The Type 247B is a versatile, multi-channel instrument that provides:
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Power supply for MKS MFCs
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Setpoint control for each channel
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Digital display of flow readings
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Remote control capability via analog or digital interface
It is widely used in:
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Semiconductor processing – CVD, etch, diffusion
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Research laboratories – Gas handling systems
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Industrial gas control – Chemical and pharmaceutical
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Thin film deposition – Sputtering and evaporation
Key Specifications
| Specification | Details |
|---|---|
| Manufacturer | MKS Instruments |
| Model | Type 247B |
| Type | Four-channel mass flow controller readout |
| Channels | 4 independent channels |
| Compatibility | MKS mass flow controllers (1179, 2259, etc.) |
| Display | 3.5-digit LED (typically cycles through channels) |
| Setpoint Control | Front panel potentiometers (one per channel) |
| Output Signal | 0-5 VDC setpoint/readout typical |
| Remote Control | Analog programming via rear connector |
| Power Supply | Provides operating power to MFCs |
| Input Power | 115/230 VAC selectable |
| Form Factor | Benchtop or rack-mount |
| Applications | Gas flow control, semiconductor, research, industrial |
Applications
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Semiconductor Manufacturing: Controlling process gas flows
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Research Laboratories: Multi-channel gas experiments
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Industrial Gas Systems: Chemical and pharmaceutical processing
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Thin Film Deposition: Sputtering and evaporation systems
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Analytical Instruments: GC, MS, and other gas-fed instruments
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Environmental Chambers: Gas mixing for controlled atmospheres
Condition
SOLD AS IS
USED – SHOWS NORMAL LAB WEAR (rack marks, scuffs, cosmetic wear)
POWER ON NOT TESTED – FUNCTIONALITY UNKNOWN
NO MASS FLOW CONTROLLERS OR CABLES INCLUDED
PICTURE MAY NOT MATCH PRODUCT
⚠ SYSTEM NOTE: This readout requires compatible MKS mass flow controllers and appropriate cables for operation. These are not included.



