MKS 6 inch butterfly valve

Product Description

MKS Instruments 6-Inch High Vacuum Butterfly Valve

This is an industrial-grade vacuum isolation valve designed for high-vacuum and ultra-high vacuum (UHV) applications. The butterfly design provides a reliable, compact seal for controlling gas flow in large-diameter vacuum lines, chambers, and load locks.

Key Features:

• Valve Type: Butterfly (ISO-KF, CF, or ISO-Flange mounting—please specify)

• Size: 6-Inch Nominal Diameter

• Actuation: Manual handle or pneumatic actuator (specify which)

• Sealing: Viton or metal seal for high vacuum integrity

• Construction: Stainless steel body, corrosion-resistant

Applications:

• Isolating chambers in semiconductor process tools (etch, CVD, PVD)

• High-vacuum research systems (physics, surface science)

• Industrial vacuum furnaces or coating systems