GCA 9280-40 laser interferometer interface

Product Description

GCA Corporation 9280-40 Laser-Interferometer Interface Module

This is a specialized OEM interface module designed for GCA wafer photolithography systems. It serves as the critical link between the laser interferometer—which provides nanometer-scale positional feedback—and the stage controller, enabling the extreme precision required for semiconductor patterning.

Key Details:

• OEM Part Number: 9280-40

• Manufacturer: GCA Corporation

• Application: High-Precision Wafer Stepper/Scanner Systems

• Function: Interfaces laser interferometer metrology data with the main stage control system

Intended Use:

• Repair and calibration of legacy GCA wafer steppers (e.g., GCA 8500, 9000 series)

• Spare parts inventory for semiconductor equipment service companies

• Retrofit or metrology system development projects