Product Description
Balzers UC010 915T Helium Compressor – For Cryopump Systems, 480V, 3-Phase
This used Balzers UC010 915T is a high-pressure helium compressor designed to support Balzers (now Pfeiffer Vacuum) cryopump systems. Cryopumps are essential for generating ultra-high vacuum (UHV) in semiconductor processing, research, and industrial applications, and the helium compressor is the critical supporting component that provides the high-pressure helium gas needed for cryopump operation.
Balzers was a pioneering manufacturer in vacuum technology, and their cryopump systems set industry standards for reliability and performance. The UC010 series compressors are known for their rugged construction and long service life in demanding environments .
Key Specifications
| Specification | Details |
|---|---|
| Manufacturer | Balzers (now Pfeiffer Vacuum) |
| Model | UC010 915T |
| Type | High-pressure helium compressor |
| Application | Support for Balzers cryopump systems |
| Power Requirements | 480V, 3-Phase |
| Frequency | 60 Hz |
| Cooling | [Water-cooled or air-cooled – inspect] |
| Dimensions | [Large floor-mount unit] |
| Gas Type | Helium |
| Compatible Cryopumps | Balzers RPK series and similar |
| Industry | Semiconductor, research, industrial vacuum |
About Cryopump Systems
Cryopumps operate by cryogenically trapping gases on extremely cold surfaces. They require:
-
A cold head (expander) mounted on the vacuum chamber
-
A helium compressor to circulate high-pressure helium through the cold head
-
Flexible helium lines connecting compressor to cold head
The compressor is typically installed remotely, up to tens of meters from the vacuum chamber, and requires adequate cooling and electrical supply.
Applications
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Semiconductor Manufacturing: Wafer processing, deposition, etching
-
Research Laboratories: Surface science, particle accelerators
-
Industrial Coating: Optical coating, thin film deposition
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Analytical Instruments: Electron microscopes, surface analyzers
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Aerospace/Defense: Space simulation chambers
Condition
SOLD AS IS
USED – SHOWS NORMAL INDUSTRIAL WEAR (scuffs, paint wear, minor rust possible)
POWER: 480V, 3-PHASE, 60Hz – NOT TESTED
NO HELIUM LINES, COLD HEAD, OR REMOTE PANEL INCLUDED
MAINTENANCE HISTORY UNKNOWN – OIL CHANGE STATUS UNVERIFIED
PICTURE MAY NOT MATCH PRODUCT
⚠ HIGH VOLTAGE / HIGH PRESSURE WARNING: This unit operates at 480V 3-phase and contains high-pressure helium. Only qualified personnel should attempt installation and operation. Proper safety procedures must be followed.
⚠ INSTALLATION NOTE: This compressor requires:
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Proper electrical connection by a licensed electrician
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Adequate cooling (water or air depending on model)
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Compatible helium lines to connect to a Balzers cryopump cold head
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Helium gas charge (typically premixed with oil)








