ASML calibration mirror 2304479-001

Product Description

ASML TWINSCAN DUV Scanner Calibration Artifact – Concave Reference Mirror with Multi-Point Dose Samplers

This is a rare, OEM calibration fixture for ASML TWINSCAN deep ultraviolet (DUV) lithography scanners (e.g., 193nm ArF or 248nm KrF systems). It is used for precise dose calibration and illumination uniformity mapping—critical for maintaining yield in semiconductor fabrication.

Key Specifications:

• Part Number: 2304479-001 REV B

• Diameter: 12.25 inches (311 mm)

• Central Mount: 3-inch kinematic/spindle mount

• Substrate: High-grade optical glass (fused silica/ULE)

• Mirror: Concave, spherical, DUV-optimized coating

• Integrated Sensors: Three fiber-coupled dose samplers (+Y, -Y axes)

• Condition: Excellent – pulled from cleanroom decommissioning

Calibration Functions:

1. Absolute Dose Calibration: Concave mirror retro-reflects projection beam for accurate power measurement.

2. Intra-Field Uniformity Mapping: Three sampling points capture scan-direction symmetry and illumination uniformity.

Ideal For:

• Semiconductor fabs maintaining legacy ASML TWINSCAN DUV tools

• Third-party service providers offering lithography tool calibration

• Precision optics labs requiring a large, stable concave DUV mirror for beam profiling or metrology R&D