Product Description
Advanced Energy Sparc-le HR Arc Suppression Unit – Model AE 3152244-000C, For Magnetron Drive Power Supplies
This used Advanced Energy Sparc-le HR (Part Number: 3152244-000C) is a specialized arc suppression unit designed as an add-on accessory for Advanced Energy magnetron drive power supplies . The “HR” designation likely indicates a High Rate or High Reliability version with enhanced capabilities for demanding sputtering applications.
Advanced Energy is a global leader in precision power conversion, measurement, and control solutions for critical applications in semiconductor equipment, industrial manufacturing, and scientific research.
About Sparc-le Technology
The Sparc-le series (Small Package Arc Repression Circuit) units are designed to enhance the arc-handling capability of MDX power supplies used in magnetron sputtering . Even though MDX power supplies exhibit excellent arc-handling characteristics with recovery response times under 10 ms, the demand for improved film quality with fewer defects has led to the development of Sparc-le technology, which clears arcs in microseconds and dramatically reduces the number of hard arcs .
The Sparc-le add-on accessory is a cost-effective alternative to improving sputtered film quality. Its small size, coupled with minor modifications to system cables, allows it to be easily retrofitted into existing systems .
Key Specifications
| Specification | Details |
|---|---|
| Manufacturer | Advanced Energy Industries, Inc. |
| Model | Sparc-le HR |
| Part Number | AE 3152244-000C |
| Type | Arc suppression unit (High Rate/High Reliability version) |
| Compatibility | Advanced Energy magnetron drive power supplies |
| Operating Modes | Active Arc-handling mode, Self-run mode, Arc-Out enhancement mode |
| Self-run Frequency | 20 kHz (shifts to 15 kHz above 700V) |
| Arc-handling Capability | Up to 40,000 arcs/sec maximum |
| Arc Recovery Time | Microseconds (significantly faster than standard MDX supplies) |
| Activation Output | Isolated BNC signal (5-V, 5-µs pulse per arc suppressed) |
| Supervisory Circuit | Internal monitoring with fault indication via User port |
| Application | Sputtering systems, thin film deposition, semiconductor processing |
Key Features & Benefits
-
Enhanced Arc Suppression: Clears arcs in microseconds, dramatically reducing hard arcs and improving film quality
-
Activation Counting: Provides isolated BNC output signal for monitoring arc rates over target life or process cycles – valuable for process optimization and defect analysis
-
Three Operating Modes: Active Arc-handling mode for normal operation, Self-run mode (20 kHz) to prevent charge buildup, and Arc-Out enhancement mode for fault conditions
-
Supervisory Circuit: Internal monitoring notifies operator of unit malfunction via User port, preventing yield loss in critical processes
-
Voltage-Dependent Self-Run: Above 700V, self-run frequency automatically shifts to 15 kHz to reduce power dissipation
-
Automatic Tracking Trigger: Works over entire output voltage range without adjustment
Operating Modes Explained
| Mode | Description |
|---|---|
| Active Arc-handling | Primary operating mode. Target current is shunted away when arc begins, voltage reversed briefly to quench arcs quickly. |
| Self-run | Shorts out and reverses target voltage for 5 µs at 20 kHz rate (15 kHz above 700V). Prevents charge buildup, slows oxide film growth, extends target life. |
| Arc-Out Enhancement | Active when unit is turned off. Functions as resonant LC network, discharging and commutating off arcs in under 20 µs. Useful for initial target conditioning. |
Applications
-
Sputtering Systems: Arc suppression for magnetron sputtering processes
-
Thin Film Deposition: Enhancing process stability in PVD applications
-
Semiconductor Manufacturing: Critical arc management in wafer processing
-
Research & Development: Thin-film coating experiments requiring stable plasmas
-
Industrial Coating: Optical coatings, decorative coatings, and hard coatings
Condition
SOLD AS IS
USED – SHOWS NORMAL INDUSTRIAL WEAR (scuffs, rack marks, minor marks)
POWER ON NOT TESTED – FUNCTIONALITY UNKNOWN
NO CABLES, MATING CONNECTORS, OR DOCUMENTATION INCLUDED
PICTURE MAY NOT MATCH PRODUCT
⚠ OPERATING NOTE: This unit requires connection to a compatible Advanced Energy MDX magnetron power supply for full functionality . The supervisory circuit requires load current to exceed 1.5 A before becoming operational .
| Weight | 24.1 lbs |
|---|---|
| Dimensions | 24 × 16 × 12 in |
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