SVG 851-0501-001 C vacuum chuck Lot of 5

Product Description

SVG (Silicon Valley Group) 851-0501-001 C Vacuum Wafer Chuck

This is a precision vacuum chuck designed to securely hold semiconductor wafers during photolithography, metrology, inspection, or other wafer processing steps. Originally used in SVG (Silicon Valley Group) track systems, steppers, or inspection tools, it ensures flat, stable, and contamination-free clamping for high-yield manufacturing.

Key Features & Specifications:

• Part Number: 851-0501-001 C

• Manufacturer: SVG (Silicon Valley Group)

• Compatibility: Likely for SVG wafer processing equipment (e.g., coater/developer tracks, aligners)

• Material: High-grade, non-marring ceramic, aluminum, or stainless steel

• Vacuum Connection: Standard fitting for vacuum line attachment

• Surface: Precision-machined flat with patterned vacuum grooves or pores

• Condition: Used, pulled from cleanroom decommissioning

Applications:

• Replacement Part: For SVG or compatible semiconductor processing tools with a damaged or worn chuck

• Metrology/Inspection: Upgrading or repairing wafer inspection station holding mechanisms

• Prototyping/R&D: Custom wafer holding for laboratory process development

• Spare Inventory: For semiconductor equipment service providers