MKS 252A-1-VPO exhaust valve controller

Product Description

MKS 252A-1-VPO Exhaust Valve Controller

This used MKS 252A-1-VPO is a specialized controller designed to operate exhaust valves for precise pressure control in vacuum and process systems. It is commonly used in semiconductor manufacturing, thin-film deposition, and other applications requiring accurate regulation of chamber pressure.

Key Features & Specifications:

• Model: 252A-1-VPO (MKS Instruments)

• Type: Exhaust/throttle valve controller

• Function: Drives valve actuator to maintain setpoint pressure

• Input: Accepts pressure transducer signal

• Output: Drive signal to valve motor/actuator

• MKS Quality: Trusted in vacuum and process control

Condition:

SOLD AS IS
USED – SHOWS NORMAL WEAR
UNTESTED – CONTROL FUNCTIONALITY NOT VERIFIED
NO VALVE, PRESSURE TRANSDUCER, OR CABLES INCLUDED
PICTURE MAY NOT MATCH PRODUCT

Potential Applications:

• Semiconductor process chamber pressure control

• Thin-film deposition systems (PVD, CVD)

• Etch and ash tools

• Research vacuum systems

• Replacement for existing MKS 252A controllers