Product Description
ULVAC GLD-135 Rotary Vane Vacuum Pump – High Performance for Industrial and Laboratory Applications
This used ULVAC GLD-135 is a high-performance rotary vane vacuum pump designed for a wide range of demanding applications including semiconductor production, vacuum metallurgy, laser processing, and cryogenic processing . It features a large, gas-sealed, stainless steel rotor with long-life stainless steel valves, ensuring high efficiency and extremely low contamination of the gas stream .
Key Specifications
| Specification | Details |
|---|---|
| Manufacturer | ULVAC Kikou, Inc. |
| Model | GLD-135 |
| Type | Oil-sealed rotary vane vacuum pump |
| Pumping Speed | 135 L/min (at 50Hz) / 162 L/min (at 60Hz) |
| Ultimate Pressure | 0.67 Pa (gas ballast closed); 6.7 Pa (gas ballast open) |
| Inlet Port | KF-25 flange |
| Outlet Port | KF-25 flange |
| Motor Power | 0.4 kW, Single phase |
| Power Supply | 100V |
| Oil Capacity | 1000 mL (uses SO-M oil) |
| Weight | 25.4 kg |
| Dimensions (WxDxH) | 170 x 493 x 241.1 mm |
| Maximum Pressure | 8.0 bar(g) |
| Flow Rate | 6.1 L/min (linear) |
Features & Benefits
-
High Performance: Delivers reliable evacuation, gas transfer, pressure boosting, and gas purification
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Durable Construction: Large stainless steel rotor with long-life stainless steel valves for extended service life
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Low Contamination: Gas-sealed design ensures minimal contamination of the gas stream
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Integrated Safety System: Comprehensive alarm unit prevents overpressurization; protected against thermal and overpressure damage
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Adjustable Rotor Width: Rotor width can be adjusted for optimum performance
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Efficient Cooling: Integrated oil circulation system ensures effective cooling and lubrication
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Flexible Mounting: Can be anchored, wall-mounted, or suspended
Applications
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Semiconductor Production: Vacuum processing for wafer fabrication
-
Vacuum Metallurgy: Metal processing under vacuum
-
Laser Processing: Vacuum chambers for laser applications
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Cryogenic Processing: Cold temperature material processing
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Scientific & Chemical Experiments: Laboratory vacuum systems
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Analytical Instruments: Vacuum for spectrometers and analyzers
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Vacuum Drying Systems: Removing moisture from materials
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Sputtering & Evaporation Systems: Thin film deposition
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Turbo Pump Backing: Roughing pump for high vacuum systems
Condition
SOLD AS IS
USED – SHOWS NORMAL WEAR (scuffs, paint wear, minor marks)
MOTOR: 0.4 kW, 100V – OPERATION NOT VERIFIED
ROTOR: SHOULD TURN FREELY – NOT TESTED
NO OIL INCLUDED (requires SO-M oil)
PICTURE MAY NOT MATCH PRODUCT
⚠ PUMP NOTE: This is an oil-sealed rotary vane pump requiring proper oil levels and regular maintenance. Should be inspected and oiled before operation.



