The MKS 1179A12CR18V is a mass flow controller (MFC) designed to measure and control gas flow rates with high precision. Based on the MKS 1179A series, this MFC offers reliable performance across various applications.
Key Specifications:
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Flow Rate: The ’12’ in the model number indicates a full-scale flow rate of 1,000 standard cubic centimeters per minute (sccm).
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Fittings: Equipped with 1/4-inch VCR-type male fittings, denoted by ‘CR18’ in the model number.
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Seals: Utilizes Viton® elastomer seals, as indicated by the ‘V’ at the end of the model number.
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Electrical Connector: Features a 15-pin D-sub connector for analog input and output signals.
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Input/Output Signals: Operates with 0-5 VDC signals for both setpoint input and flow output.
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Accuracy: Typically offers an accuracy of ±1% of full scale, ensuring precise flow measurements.
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Operating Pressure: Designed to handle a maximum inlet pressure of 150 psig, with a normal operating pressure differential between 10 to 40 psid.



