Wafer Transport Module

Description

This is a portion of a Nikon Optistation III. It contains two vacuum arms for transporting individual wafers between the two observation modules on the Optistation (microscope and macro defect inspection station). The wiring harnesses remain intact but the vacuum lines to the module were cut. Please examine the photos to see exactly what is included with the module. No other parts are supplied.

Photo set 1734.

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***MPN
***OEM Nikon
***SKU*** 23148